Such as the automotive semiconductor market and the AI market, it is anticipated that demands of semiconductors will continue growing all over the world.
We UNIPULSE offer a huge variety of sensor products that can be used for various processes such as manufacturing, testing, servicing etc. of semiconductors.
From among them, we introduce "UWR", a beam type load cell that does not generate siloxane gas in this issue.
UWR is a beam type load cell. With a capacity of 10 N, an accuracy of 0.03 %, and a natural frequency of 2.5 kHz, small load can be measured with high accuracy and speed.
It is a "Siloxane-free" load cell that does not generate siloxane, which is an essential requirement for the field of semiconductor fabrication.
Siloxane, a gas generated from silicone resins, causes a variety of problems at semiconductor fabrication processes. While silicone resins are essential materials for load cell manufacturing because of their good heat resistance, insulation and weather resistance, it is necessary to select the equipment that does not generate siloxane gas for semiconductor fabrication sites.
Analysis has confirmed that no siloxane gas is detected from UWR, thus you can use the product without worries even inside of semiconductor fabrication equipment.
Siloxane-free beam type load cell UWR: Recommended for such applications in semiconductor fabrication process!
- Gripping force management of wafer transfer robot
- Management of normal application load during wafer polishing
- Load control of chip mounters
- Control of pressure during wire bonding
Unipulse's load cells can be custom-ordered too for specified applications because we manufacture springs and strain gauges in-house!
Custom-orders for semiconductor fabrication processes such as high temperature- & vacuum-compliant as well as siloxane-free are also possible! Feel free to ask us.