Such as the automotive semiconductor market and the AI market, it is anticipated that demands of semiconductors will continue growing all over the world.

We UNIPULSE offer a huge variety of sensor products that can be used for various processes such as manufacturing, testing, servicing etc. of semiconductors.

"UTMIII", the latest model of the rotating torque meter UTM series and a standard of the shaft type torque measurement, has been introduced to many semiconductor fabrication and inspection processes.

At silicon wafer processing and inspection processes of a semiconductor fabrication process, an ultra-precision positioning in micron unit is necessary. For precision XY stages that hold wafers, ball screws are used; these ball screws allow the XY stages high speed and high precision positioning.

On semiconductor fabrication equipment such as thin film forming device or grinding machine, due to depositions of discarded films or sludges inside the equipment, excessive force may apply to drive units inside the device or the accuracy may decrease.

By monitoring torque of a driving motor with UTMIII, a maintenance timing can be learned from an upward trend. Consequently, maintenance can be conducted in a systematic manner, and the downtime of a production line can be minimized.

UTMIII series is a rotating torque meter ideal for applications where high accuracy torque measurement is required. Its lowest capacity is small as 0.05Nm; even minute torque can be measured and evaluated precisely.

While it is high responsiveness, high accuracy and high stiffness, UTMIII is resistant to influences on accuracy by radial and thrust load as well as high speed rotation. Besides, it is easy to install in machinery due to its compact design.

In addition, UTMIII can be used for the following processes such as:

• For detecting a clogging of a grinding stone during grinding process of silicon wafer.
  It helps to know appropriate timing for dressing.
• For torque management at a dicing process. It prevents defects such as blades damages and chipping of workpieces.
• For tightening torque management at assembly processes.

UNIPULSE's sensor products such as displacement sensors, load cells, torque meters can be used at various processes of semiconductor fabrication, inspection, services and more.

A demo unit is available! Please feel free to ask our sales staff.