Product outline

Ideal for incorporating into inspection equipment of semiconductor manufacturing! Siloxane-free load-cell

At a manufacturing site of semiconductors, an equipment which does not let silicone resin generate siloxane is essential.
UWR is a beam type loadcell that does not generate siloxane.
Taking into account the applications around silicon wafer, the fluorine resin cable is used.

Specifications

Model UWR-10N
Rated capacity 10 N
Rated output Approx. 0.5 mV/V
Safe overload 300% R.C.
Zero balance ±20% R.O.
Non-linearity 0.03% R.O.
Hysteresis 0.03% R.O.
Repeatability 0.02% R.O.
Compensated temperature
range
0 to +50℃
Safe temperature range −10 to +70℃
Temperature effect on zero 0.5% R.O./10℃
Temperature effect on span 0.2% R.O./10℃
Input resistance Approx. 1000 Ω
Output resistance Approx. 1000 Ω
Recommended excitation
voltage
5 V
Insulation resistance(DC 50 V) 1000 MΩ or more
Cable φ2 4-conductor fluorine resin cable (3m)
Cable end: 5 wires
Deflection at rated 0.04 mm
Natural frequency 2.5 kHz
Weight Approx. 40 g (not including cable)
Load cell material Aluminum alloy
RoHs directive 2011/65/EU(EU)2015/863

 

Application example & Wiring diagram

Example of use
Wiring diagram

External dimension

External dimension

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Operation manual(PDF)
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