Product outline
Ideal for incorporating into inspection equipment of semiconductor manufacturing! Siloxane-free load-cell
At a manufacturing site of semiconductors, an equipment which does not let silicone resin generate siloxane is essential.
UWR is a beam type loadcell that does not generate siloxane.
Taking into account the applications around silicon wafer, the fluorine resin cable is used.
Specifications
Model | UWR-10N | |||
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Rated capacity | 10 N | |||
Rated output | Approx. 0.5 mV/V | |||
Safe overload | 300% R.C. | |||
Zero balance | ±20% R.O. | |||
Non-linearity | 0.03% R.O. | |||
Hysteresis | 0.03% R.O. | |||
Repeatability | 0.02% R.O. | |||
Compensated temperature range |
0 to +50℃ | |||
Safe temperature range | −10 to +70℃ | |||
Temperature effect on zero | 0.5% R.O./10℃ | |||
Temperature effect on span | 0.2% R.O./10℃ | |||
Input resistance | Approx. 1000 Ω | |||
Output resistance | Approx. 1000 Ω | |||
Recommended excitation voltage |
5 V | |||
Insulation resistance(DC 50 V) | 1000 MΩ or more | |||
Cable | φ2 4-conductor fluorine resin cable (3m) Cable end: 5 wires |
Deflection at rated | 0.04 mm | |
Natural frequency | 2.5 kHz | |||
Weight | Approx. 40 g (not including cable) | |||
Load cell material | Aluminum alloy | RoHs directive | 2011/65/EU(EU)2015/863 | |
Application example & Wiring diagram
External dimension
Download
Product catalogue(PDF)
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⇒Download Page | |
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Operation manual(PDF)
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External dimension
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DXF
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PDF
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Support tools
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Software
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